Gas jet nozzle for extreme ultraviolet light source

A gas jet nozzle (20, 60) for an extreme ultraviolet light (EUV) source, including a housing (22, 62) having a front (24, 64) and a back (26, 66). The housing (22, 62) is coupleable to a primary gas source (44) and a secondary gas source (46) and is adapted to expel primary gas (36, 76) and secondar...

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Bibliographic Details
Main Authors CLENDENING, CHARLES W., JR, MCGREGOR, ROY D
Format Patent
LanguageEnglish
French
German
Published 03.04.2002
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
DEVICES USING STIMULATED EMISSION
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
GAMMA RAY OR X-RAY MICROSCOPES
HOLOGRAPHY
IRRADIATION DEVICES
MATERIALS THEREFOR
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
SEMICONDUCTOR DEVICES
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
X-RAY TECHNIQUE
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Summary:A gas jet nozzle (20, 60) for an extreme ultraviolet light (EUV) source, including a housing (22, 62) having a front (24, 64) and a back (26, 66). The housing (22, 62) is coupleable to a primary gas source (44) and a secondary gas source (46) and is adapted to expel primary gas (36, 76) and secondary gas (42, 82) from the housing front (24, 64). The housing (22, 62) has a gas-expelling primary channel (30, 70) located centrally within the housing (22, 62) and a gas-expelling secondary channel (34, 74) proximate the primary channel (30, 70). The primary channel (30, 70) may be circular and the secondary channel (34, 74) may be annular, surrounding the primary channel (30, 70). A secondary gas stream (42, 82) expelled from the secondary channel (34, 74) restricts the lateral expansion of a primary gas stream (36, 76) expelled from the primary channel (30, 70), optimizing gas jet properties and reducing heating and erosion of the nozzle (20, 60).
Bibliography:Application Number: EP20010109305