SYNTHETIC QUARTZ GLASS AND METHOD FOR PREPARING THE SAME

A synthetic quartz glass to be used for light with a wavelength of from 150 to 200 nm, wherein the OH group concentration is at most 100 ppm, the hydrogen molecule concentration is at most 1x10 molecules/cm , reduction type defects are at most 1x10 defects/cm , and the relation between DELTA k163 an...

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Bibliographic Details
Main Authors SIMODAIRA, NORIAKI, YOSHIZAWA, SHUHEI, KIKUGAWA, SHINYA, MASUI, AKIO, IKUTA, YOSHIAKI
Format Patent
LanguageEnglish
French
German
Published 22.08.2001
Edition7
Subjects
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS
CHEMISTRY
GLASS
JOINING GLASS TO GLASS OR OTHER MATERIALS
MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
METALLURGY
MINERAL OR SLAG WOOL
SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS
SURFACE TREATMENT OF GLASS
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Summary:A synthetic quartz glass to be used for light with a wavelength of from 150 to 200 nm, wherein the OH group concentration is at most 100 ppm, the hydrogen molecule concentration is at most 1x10 molecules/cm , reduction type defects are at most 1x10 defects/cm , and the relation between DELTA k163 and DELTA k190, as between before and after irradiation of ultraviolet rays, satisfies 0< DELTA k163< DELTA k190, and a process for its production.
Bibliography:Application Number: EP20000937201