SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER, PROCESS FOR PRODUCING THE SAME, AND METHOD OF USING THE SAME

A process for producing a synthetic quartz glass for an optical member, which comprises a step of irradiating a synthetic quartz glass having an OH group content of 50 ppm or lower with vacuum ultraviolet light having a wavelength of 180 nm or shorter to improve the transmittance in a region of wave...

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Bibliographic Details
Main Authors YOSHIZAWA, SHUHEI, KIKUGAWA, SHINYA, MASUI, AKIO, SHIMODAIRA, NORIAKI, IKUTA, YOSHIAKI
Format Patent
LanguageEnglish
French
German
Published 04.04.2001
Edition7
Subjects
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Summary:A process for producing a synthetic quartz glass for an optical member, which comprises a step of irradiating a synthetic quartz glass having an OH group content of 50 ppm or lower with vacuum ultraviolet light having a wavelength of 180 nm or shorter to improve the transmittance in a region of wavelengths of not longer than 165 nm.
Bibliography:Application Number: EP20000911387