SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER, PROCESS FOR PRODUCING THE SAME, AND METHOD OF USING THE SAME
A process for producing a synthetic quartz glass for an optical member, which comprises a step of irradiating a synthetic quartz glass having an OH group content of 50 ppm or lower with vacuum ultraviolet light having a wavelength of 180 nm or shorter to improve the transmittance in a region of wave...
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Main Authors | , , , , |
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Format | Patent |
Language | English French German |
Published |
04.04.2001
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A process for producing a synthetic quartz glass for an optical member, which comprises a step of irradiating a synthetic quartz glass having an OH group content of 50 ppm or lower with vacuum ultraviolet light having a wavelength of 180 nm or shorter to improve the transmittance in a region of wavelengths of not longer than 165 nm. |
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Bibliography: | Application Number: EP20000911387 |