CHEMICAL-MECHANICAL POLISHING SLURRY FORMULATION AND METHOD FOR TUNGSTEN AND TITANIUM THIN FILMS
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
12.01.2000
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Bibliography: | Application Number: EP19980913168 |
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