Capacitive pressure transducer having reduced output error

A fluid pressure sensor (10) having a capacitive pressure transducer (12) having a thin, relatively flexible ceramic diaphragm (14) mounted in closely spaced apart relation to a rigid ceramic substrate (16) by a glass annulus (18) mounted in a housing (46) having a port (46a) for fluid whose pressur...

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Bibliographic Details
Main Authors BERKSON, MITCHELL H, SOGGE, DALE R
Format Patent
LanguageEnglish
French
German
Published 03.11.1999
Edition6
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:A fluid pressure sensor (10) having a capacitive pressure transducer (12) having a thin, relatively flexible ceramic diaphragm (14) mounted in closely spaced apart relation to a rigid ceramic substrate (16) by a glass annulus (18) mounted in a housing (46) having a port (46a) for fluid whose pressure is to be sensed to be received on an outer face of the diaphragm. An electronic circuit (50) is mounted in a chamber (38) formed between a connector (36) and an outer face (12b) of the substrate. A source capacitor plate (20) and source trace (20b) are printed on the diaphragm and a detect plate (22) and detect trace (22b) are printed on a substrate with a guard plate (28, 28', 28''; 30, 30'') printed on both the diaphragm and substrate completely surrounding the source and detect plates and traces.
Bibliography:Application Number: EP19990302927