Process for self-aligned implantation

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Bibliographic Details
Main Authors JANSEN, PHILIPPE, BAKLANOV, MIKHAIL RODIONOVICH, DEFERM, LUDO, DONATON RICARDO ALVES, MAEX, KAREN IRMA JOSEF, ROOYACKERS, RITA, VERBEECK, RITA
Format Patent
LanguageEnglish
French
German
Published 03.01.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: EP19990200531