Nozzle-injector for arc plasma deposition apparatus
A nozzle-injector was designed and fabricated for plasma deposition of thin-film coatings using a wall-stabilized arc torch as the plasma generator. The divergent design of the nozzle-injector controls the injection, ionization, and reaction of the reagents, and these functions, in turn, determine t...
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Main Author | |
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Format | Patent |
Language | English French German |
Published |
30.12.1998
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | A nozzle-injector was designed and fabricated for plasma deposition of thin-film coatings using a wall-stabilized arc torch as the plasma generator. The divergent design of the nozzle-injector controls the injection, ionization, and reaction of the reagents, and these functions, in turn, determine the coating deposition rate, coating area, coating composition, and coating quality. |
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Bibliography: | Application Number: EP19980305071 |