Means for reducing the contamination of mass spectrometer leak detector ion sources

Mass spectrometer leak detector comprise (a) a vacuum envelope including a cavity; (b) an ion source placed within the cavity for producing an ion beam; and (c) a ground plate having an exit split for the ion beam. The improvement is (d) a liner surrounding the ion source and supported firmly within...

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Bibliographic Details
Main Author BUTTRILL, SIDNEY
Format Patent
LanguageEnglish
French
German
Published 19.06.1996
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Summary:Mass spectrometer leak detector comprise (a) a vacuum envelope including a cavity; (b) an ion source placed within the cavity for producing an ion beam; and (c) a ground plate having an exit split for the ion beam. The improvement is (d) a liner surrounding the ion source and supported firmly within the cavity of the vacuum envelope. Also claimed is the mass spectrometer.
Bibliography:Application Number: EP19950309037