Field emission type electron emitting device and method of producing the same

• Main Authors: MATSUZAKI, KAZUO, FUJI ELECTRIC CO., LTD, NISHIZAWA, MASATO, FUJI ELECTRIC CO., LTD, ITOH, JUNJI, UEMATSU, TAKIHIKO, FUJI ELECTRIC CO., LTD, RYOKAI, YOICHI, FUJI ELECTRIC CO., LTD
• Format: Patent
• Language: English; French; German
• Published: 14.02.1996
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

In a comb-like or wedge-like electron emitting device, an emitter or both an emitter and an anode electrode are processed from a single-crystal silicon thin film of an SOI wafer. The single-crystal silicon thin film in portions other than the processed portion is removed so that the silicon oxide la...