Angular velocity sensor

A multiple-axis gas flow type angular velocity sensor (1) which can accurately and stably detect the magnitude and direction of angular velocities acting in two or more directions is comprised of a plurality of semiconductor substrates (2-5) on which are formed thermosensitive resistor elements (HW-...

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Bibliographic Details
Main Authors KURIYAMA, NARIAKI, NISHIO, TOMOYUKI, FUEKI, NOBUHIRO
Format Patent
LanguageEnglish
French
German
Published 31.10.2001
Edition7
Subjects
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Summary:A multiple-axis gas flow type angular velocity sensor (1) which can accurately and stably detect the magnitude and direction of angular velocities acting in two or more directions is comprised of a plurality of semiconductor substrates (2-5) on which are formed thermosensitive resistor elements (HW-R, HW-L; HW-U, HW-D) and gas passage portions (7,9,11,13) by performing precision processing using a photo-engraving process from the semiconductor production field. The semiconductor substrates (2-5) are laminated together to provide a sensor having a plurality of pairs of resistor elements (HW-R, HW-L; HW-U, HW-D) in a gas passage (7,9,11,13).
Bibliography:Application Number: EP19950301949