Substrate holding device
The device includes a member defining a fluid passageway, a normally inflated porous material mounted on the member in communication with the fluid passageway of the member, and a mechanism, in communication with the member, for deflating the porous material. The deflating mechanism is de-energised...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English French German |
Published |
17.11.1994
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Edition | 5 |
Subjects | |
Online Access | Get full text |
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Summary: | The device includes a member defining a fluid passageway, a normally inflated porous material mounted on the member in communication with the fluid passageway of the member, and a mechanism, in communication with the member, for deflating the porous material. The deflating mechanism is de-energised in response to the porous material being disposed into the opening in the substrate for enabling the porous material to return to being normally inflated to hold the substrate. |
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Bibliography: | Application Number: EP19940303441 |