INSPECTION METHOD AND APPARATUS
An inspection method includes the steps of forming a first beam of first polarization and a second beam of second polarization different from the first polarization, illuminating a surface to be inspected, with the first beam, and detecting an interference beam resulting from interference between th...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French German |
Published |
30.01.2002
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | An inspection method includes the steps of forming a first beam of first polarization and a second beam of second polarization different from the first polarization, illuminating a surface to be inspected, with the first beam, and detecting an interference beam resulting from interference between the second beam and a particular beam being scattered from the surface illuminated with the first beam and advancing in a direction sideways to the direction of illumination with the first beam, the scattered beam having its polarization being changed from the first polarization. |
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Bibliography: | Application Number: EP19930309113 |