A scanning electron microscope and method for controlling a scanning electron microscope

A scanning electron microscope is provided with a channel cylinder (21) between a sample (18) and an electron source (1). The channel cylinder generates a deceleration electrical field to decelerate an electron beam emitted from the electron source. The channel cylinder has a portion having an elect...

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Bibliographic Details
Main Authors TODOKORO, HIDEO, OHTAKA, TADASHI
Format Patent
LanguageEnglish
French
German
Published 22.09.1993
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A scanning electron microscope is provided with a channel cylinder (21) between a sample (18) and an electron source (1). The channel cylinder generates a deceleration electrical field to decelerate an electron beam emitted from the electron source. The channel cylinder has a portion having an electron source side and sample side. A detector (16) is provided on the electron source side of the channel cylinder portion. The detector detects the secondary signal emitted from the sample, so that a scan image is obtained with a high spatial resolution.
Bibliography:Application Number: EP19930301932