Ion-scattering spectrometer

• Main Authors: HAYASHI, SHIGEKI, KUMASHIRO, SUMIO, AONO, MASAKAZU, KATAYAMA, MITSUHIRO
• Format: Patent
• Language: English; French; German
• Published: 03.06.1992
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

There is disclosed an ion-scattering spectrometer comprising an ion source (2), a first control electrode (3) for controlling an ion beam emitted by the ion source (2), a detector (4) for detecting scattered particles, and a second control electrode (5) for controlling the ion beam, which is directed from the ion source (2) toward a sample (S), as well as the scattered particles, are arranged on the same axis (X) along with the sample (S). The ion beam directed from the ion source (2) toward the sample (S), and the scattered particles, which are scattered from the sample (S) and are directed toward the detector (4), are caused to converge. The proposed spectrometer attains improved micro-structural analysis of the sample surface and raised ion detection efficiency.