OPTICAL MEMBER MADE OF HIGH-PURITY AND TRANSPARENT SYNTHETIC SILICA GLASS AND METHOD FOR PRODUCTION THEREOF AND BLANK THEREOF
This invention relates to an optical member made of synthetic silica glass of high-purity and transparency, and a method for manufacture a blank thereof or the optical member, and more especially to optical members assembled in assembled in various apparatus employing such high-power laser beams as...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
28.04.1993
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Edition | 5 |
Subjects | |
Online Access | Get full text |
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Summary: | This invention relates to an optical member made of synthetic silica glass of high-purity and transparency, and a method for manufacture a blank thereof or the optical member, and more especially to optical members assembled in assembled in various apparatus employing such high-power laser beams as an excimer laser. The optical member comprising: having absolute refractive index, nd, of 1.460 or more, and having hydrogen molecule concentration of about 5 x 10 molecules/cm or more. |
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Bibliography: | Application Number: EP19910118411 |