OPTICAL MEMBER MADE OF HIGH-PURITY AND TRANSPARENT SYNTHETIC SILICA GLASS AND METHOD FOR PRODUCTION THEREOF AND BLANK THEREOF

This invention relates to an optical member made of synthetic silica glass of high-purity and transparency, and a method for manufacture a blank thereof or the optical member, and more especially to optical members assembled in assembled in various apparatus employing such high-power laser beams as...

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Bibliographic Details
Main Authors TAKKE, RALF, YAMAGATA, SHIGERU, KURIYAMA, MICHIYOU, INAKI, KYOICHI
Format Patent
LanguageEnglish
Published 28.04.1993
Edition5
Subjects
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Summary:This invention relates to an optical member made of synthetic silica glass of high-purity and transparency, and a method for manufacture a blank thereof or the optical member, and more especially to optical members assembled in assembled in various apparatus employing such high-power laser beams as an excimer laser. The optical member comprising: having absolute refractive index, nd, of 1.460 or more, and having hydrogen molecule concentration of about 5 x 10 molecules/cm or more.
Bibliography:Application Number: EP19910118411