Laser apparatus with means for detecting the laser power level

Apparatus for detection of laser output on a semiconductor wafer, wherein the laser and detector can be formed by similar or simultaneous processes on the same semiconductor substrate. More particularly, a laser cavity and a detection cavity (13, 19) are formed on a semiconductor wafer (11) in paral...

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Bibliographic Details
Main Authors SCIFRES, DONALD R, CONNELL, NEVILLE G.A, PAOLI, THOMAS L, THORNTON, ROBERT L
Format Patent
LanguageEnglish
French
German
Published 17.01.1996
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Apparatus for detection of laser output on a semiconductor wafer, wherein the laser and detector can be formed by similar or simultaneous processes on the same semiconductor substrate. More particularly, a laser cavity and a detection cavity (13, 19) are formed on a semiconductor wafer (11) in parallel, such that light emitted laterally from the laser cavity is detected by the detection cavity. The amount of light detected can then be transformed into data, which in turn can be used to control the output of the laser. Advantages of the present invention include the ability to simultaneously form the laser and detector portions. The detector portion does not interfere with the beam being provided by the laser, and multiple laser-sensor pairs can be integrated on a single semiconductor substrate.
Bibliography:Application Number: EP19910302758