Electron Microscope

An electron microscope eliminatines external ducting for evacuation by interlinking the interiors of a sample chamber (12) for a sample, a casing (50) for electron lenses (56,58) and a chamber (42) for an electron gun (44). Those interiors form a closed space with an evacuation path extruding theret...

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Bibliographic Details
Main Author OHTAKA, TADASHI
Format Patent
LanguageEnglish
French
German
Published 24.01.1990
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:An electron microscope eliminatines external ducting for evacuation by interlinking the interiors of a sample chamber (12) for a sample, a casing (50) for electron lenses (56,58) and a chamber (42) for an electron gun (44). Those interiors form a closed space with an evacuation path extruding therethrough and are evacuated by evacuation means (vacuum pump) connected to the sample chamber (12). The electron lenses (56,58) are contained within sealed modules and the evacuation path passes betveen the sides of those modules and the internal walls of the casing (50). The resulting structure may be enclosed in substantially unbroken magnetic shielding (18).
Bibliography:Application Number: EP19890307301