DEVICE INCLUDING A SUBSTRATE-SUPPORTED OPTICAL WAVEGUIDE,AND METHOD OF MANUFATURE

In the manufacture of optical devices such as, e.g., optical communications assemblies and optical gyroscopes, low-loss substrate-supported optical waveguides are desired. Such waveguides can be obtained by patterning a layer of deposited waveguide material and, in the interest of minimizing loss as...

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Bibliographic Details
Main Authors HENRY, CHARLES HOWARD, LEVY, ROLAND ALBERT
Format Patent
LanguageEnglish
Published 24.10.1990
Edition4
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:In the manufacture of optical devices such as, e.g., optical communications assemblies and optical gyroscopes, low-loss substrate-supported optical waveguides are desired. Such waveguides can be obtained by patterning a layer of deposited waveguide material and, in the interest of minimizing loss as may be due to processing-induced surface roughness, waveguides as patterned preferably undergo a heat treatment which results in surface smoothing and in rounding of the waveguides cross section. Furthermore, in the interest of avoiding re-entrant corners between substrate and waveguide, a wetting layer may be applied to the waveguide prior to heat treatment.
Bibliography:Application Number: EP19890301714