METHOD FOR ELECTRON BEAM GUIDANCE WITH ENERGY SELECTION, AND ELECTRON SPECTROMETER
High energy resolution at high electron current at the specimen or at the detector is obtained by an electron beam guiding with focusing energy selection, in particular in an electron spectrometer with emission system and at least one energy dispersive system with different focusing in two mutually...
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Main Authors | , , |
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Format | Patent |
Language | English German |
Published |
10.03.1993
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Subjects | |
Online Access | Get full text |
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Summary: | High energy resolution at high electron current at the specimen or at the detector is obtained by an electron beam guiding with focusing energy selection, in particular in an electron spectrometer with emission system and at least one energy dispersive system with different focusing in two mutually perpendicular directions, by a non-circular-symmetrical lens system placed after or before the energy dispersive system and correcting the different focusing of the electrons in the two mutually perpendicular directions such that either the virtual or the real entry stop of the energy dispersive system is imaged on an accessible image plane outside the energy dispersive system or an object outside the energy dispersive system is imaged on the virtual or real exit stop of the latter. |
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Bibliography: | Application Number: EP19880100724 |