OPTICAL RELAY SYSTEM WITH MAGNIFICATION

There is disclosed a ring field relay optical system incorporating concave spherical mirrors (10, 14, 16) and including magnification achieved, at least partially, by a convex spherical mirror (12). In further modifications, aberrations introduced by the convex mirror are controlled by lens groups f...

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Bibliographic Details
Main Authors SHAFER, DAVID ROSS, OFFNER, ABE, SINGH, RAMA
Format Patent
LanguageEnglish
Published 12.10.1988
Edition4
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:There is disclosed a ring field relay optical system incorporating concave spherical mirrors (10, 14, 16) and including magnification achieved, at least partially, by a convex spherical mirror (12). In further modifications, aberrations introduced by the convex mirror are controlled by lens groups formed from fused silica. The system is usable from the visible through the deep ultraviolet portion of the spectrum.
Bibliography:Application Number: EP19870117111