METHOD OF CREATING PATTERNED MULTILAYER FILMS FOR USE IN THE PRODUCTION OF SEMICONDUCTOR CIRCUITS AND SYSTEMS

• Main Authors: ITO, HIROSHI, HEFFERON, GEORGE JOSEPH, MACDONALD, SCOTT ARTHUR, WILLSON, CARLTON GRANT
• Format: Patent
• Language: English
• Published: 28.09.1988
• Edition: 4
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES