Fixed slit type photoelectric microscope

• Main Authors: SHINOZAKI, TOSHIAKI, MORI, ICHIRO
• Format: Patent
• Language: English; French; German
• Published: 14.03.1984
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TESTING

A fixed-slit type photoelectric microscope comprises an irradiation system (13 to 20) for irradiating a linear pattern (12) with light, an objective (21) for forming an image of the linear pattern, a single slit (24) disposed at a point conjugate to the linear pattern with respect to the objective, a photoelectric conversion element (28) for converting the light from the slit into an electrical signal, a rectifying circuit (30) for rectifying an electrical signal from the photoelectric conversion element, and an indicator for visualizing the rectified signal. The irradiation system generates a pair of polarized lights (P', Q') with planes of polarization orthogonal to each other and alternately illuminates the linear pattern with the pair of polarized lights at fixed periods. For deflecting the pair of polarized lights from the linear pattern in different directions, an optical deflecting element (25) is provided between the linear pattern and the slit. Different portions of the slit are illuminated by the pair of polarized lights deflected by the optical deflecting elements.