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The converter has a membrane structure comprising a piezo layer with a piezoelectric material arranged on a carrier layer i.e. silicon layer, so that vibrations of the membrane structure are generated by applying voltage to the piezo layer. The structure is divided into segments (9a, 9b) in a surfac...

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Bibliographic Details
Main Authors Muralt, Paul, Goll, Erich Dr, Conde, Janine, Zenner, Hans-Peter, Schäfer, Armin, Kaltenbacher, Dominik, Dalhoff, Ernst, Schächtele, Jonathan
Format Patent
LanguageDanish
Published 05.12.2016
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Summary:The converter has a membrane structure comprising a piezo layer with a piezoelectric material arranged on a carrier layer i.e. silicon layer, so that vibrations of the membrane structure are generated by applying voltage to the piezo layer. The structure is divided into segments (9a, 9b) in a surface of the structure by cutting lines (7) so that a membrane is mechanically coupled to the cutting lines that cut through all layers of the structure. One of the cutting lines structures the structure into a spiral segment that runs around a middle point of the structure. An independent claim is also included for a method for manufacturing a sound converter.
Bibliography:Application Number: DK20110001587T