IONENQUELLESTEUERUNGSSYSTEM UND VERFARHEN

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam "on" and beam "off" states is presented. The process and control system provide ver...

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Bibliographic Details
Main Authors NAVY, ABRAHAM J, FREMGEN, ROGER P, HAYES, ALAN V, TREYGER, GENRIKH, OSTAN, EDWARD W, JACOB, JOHN, KANAROV, VICTOR, LAKIOS, EMMANUEL N
Format Patent
LanguageGerman
Published 15.11.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam "on" and beam "off" states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.
Bibliography:Application Number: DE19986037258T