Aufschlämmung-Mischvorrichtung und Verfahren

The system has three pumps (10, 13, 16) for the slurry concentrate, de-ionised water and an oxidizer, and a flow network with dispense (34) and recycle (36) legs. A junction (26) connects the pumped streams and the recycle stream to form a mixture and at least one mixer forms the slurry. An outlet p...

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Bibliographic Details
Main Authors ROBERTS, BENJAMIN R, POZNIAK, PETER M, TRANG, DUY KHANH
Format Patent
LanguageGerman
Published 29.12.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:The system has three pumps (10, 13, 16) for the slurry concentrate, de-ionised water and an oxidizer, and a flow network with dispense (34) and recycle (36) legs. A junction (26) connects the pumped streams and the recycle stream to form a mixture and at least one mixer forms the slurry. An outlet pump (32) pumps the mixture from the mixer. The recycle leg has a pressure reduction valve (390 for reducing the dispense pressure to that of the inlet pumps. Preferred Features: The mixer preferably consists of a hopper mixer (30) and a static mixer (28), and the pumps are preferably variable speed. An independent claim is included for a method for producing a slurry from a slurry concentrate.
Bibliography:Application Number: DE19986028754T