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Summary:A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1 % and less and an outgassing rate of 2.5x10<-> (Pa. l /sec/cm :at 200 DEG C) and less.
Bibliography:Application Number: DE19936009176T