Ultrahoch-Vakuumapparat
A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1 % and less and...
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Main Authors | , , , , , , |
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Format | Patent |
Language | German |
Published |
16.10.1997
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1 % and less and an outgassing rate of 2.5x10<-> (Pa. l /sec/cm :at 200 DEG C) and less. |
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Bibliography: | Application Number: DE19936009176T |