Integrierte Schaltungsanordnung mit Abschirmungsvorrichtung und Verfahren zu ihrer Herstellung

• Main Authors: ANDERSSON, BO SIXTEN, S-172 47 SUNDBYBERG, SE, LIND, HANS TOMMY, S-117 39 STOCKHOLM, SE
• Format: Patent
• Language: German
• Published: 02.11.1995
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An integrated semiconductor circuit (1) includes a substrate (2), an epitaxial layer (3) having transistor base regions (4), a first (5) and a second (11) insulating oxide layer, and a protective layer (13). The first oxide layer carries heavily doped (n<+>) polycrystalline layers, including a...