Verfahren zum Prüfen von Unterbrechungen/Kurschlüssen bei kapazitiv gekoppelten Netzen in Substraten unter Verwendung von Elektronenstrahlen

• Main Authors: HUTSON, DAVID JOSEPH, RASCH, JUERGEN, MEISBURGER, WILLIAM D, HOHN, FRITZ JUERGEN, GOLLADAY, STEVEN DOUGLAS
• Format: Patent
• Language: German
• Published: 29.05.2002
• Edition: 7
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; SEMICONDUCTOR DEVICES; TESTING