Turbomolekularpumpe

PROBLEM TO BE SOLVED: To inhibit or prevent formation of a side product in a pump by a specific process and enable establishment of a wide operable range. SOLUTION: A turbo-molecular pump includes a casing 14 having a rotor R and a stator S held in the casing, a blade exhaust part L1and/or a groove...

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Bibliographic Details
Main Authors MIYAMOTO, MATSUTARO, OGAMINO, HIROAKI
Format Patent
LanguageGerman
Published 04.12.2008
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To inhibit or prevent formation of a side product in a pump by a specific process and enable establishment of a wide operable range. SOLUTION: A turbo-molecular pump includes a casing 14 having a rotor R and a stator S held in the casing, a blade exhaust part L1and/or a groove exhaust part L2composed of the rotor R and the stator S, an inner casing 152 surrounding circumference of the blade exhaust part L1and/or the groove exhaust part L2, and temperature adjustment mechanisms 206, 208 attached to a stator of the inner casing or the groove exhaust part L2. COPYRIGHT: (C)2008,JPO&INPIT
Bibliography:Application Number: DE2000637353T