Verfahren zur Herstellung einer Dünnschicht-Elektrolumineszenz-Vorrichtung

• Main Authors: SHIBATA, KAZUYOSHI, KAWASAKI, JP, NAKAMATA, SHINICHI, KAWASAKI, JP, TANIGUCHI, HARUTAKA, KAWASAKI, JP, KATOU, HISATO, KAWASAKI, JP, KAWASHIMA, TOMOYUKI, KAWASAKI, JP
• Format: Patent
• Language: German
• Published: 22.12.1994
• Edition: 5
• Subjects: ADHESIVES; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; DYES; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; POLISHES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A method for manufacturing a thin-film EL device, wherein a light-emitting layer 4 of the thin-film EL device containing zinc sulphide and manganese added to donate light-emitting centres is grown by a reactive sputtering technique that employs a sputtering gas containing a sulphur compound, is char...