Halbleiter-Drucksensor

PCT No. PCT/JP93/01771 Sec. 371 Date Aug. 10, 1994 Sec. 102(e) Date Aug. 10, 1994 PCT Filed Dec. 6, 1993 PCT Pub. No. WO94/14042 PCT Pub. Date Jun. 23, 1994The present invention aims to provide a semiconductor type pressure sensor capable of preventing an occurrence of a thermal output value, thereb...

Full description

Saved in:
Bibliographic Details
Main Author YAMASHITA, YASUHIRO, AICHI, JP
Format Patent
LanguageGerman
Published 09.04.1998
Edition6
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:PCT No. PCT/JP93/01771 Sec. 371 Date Aug. 10, 1994 Sec. 102(e) Date Aug. 10, 1994 PCT Filed Dec. 6, 1993 PCT Pub. No. WO94/14042 PCT Pub. Date Jun. 23, 1994The present invention aims to provide a semiconductor type pressure sensor capable of preventing an occurrence of a thermal output value, thereby improving a linearity of the output with respect to a change in the temperature. The sensor includes housing 8 provided with a pressure detecting chamber 3, a pressure receiving diaphragm 2 arranged to be adjacent the liquid confined in the pressure detecting chamber 3, and a pressure detecting element 4 arranged in the pressure detecting chamber 3 so as to receive the pressure of the liquid. The diaphragm 2 includes at a location adjacent its fixed end a corrugation 2c, which is made of a pair of convex and concave portions 2a and 2b, and a flat portion 2d. A ratio of the distance between the convex and concave portions 2a and 2b, and the radius R of the diaphragm 2, and a ratio of the flat portion 2d and the radius R of the diaphragm 2 are set to respective desired ranges.
Bibliography:Application Number: DE19934396523