Semiconductor test system for checking integrated circuit - synchronises test device and optical-beam-induced-current measurement device and evaluates IC and OBIC output signals

A test system contains an Optical Beam Induced Current or OBIC measurement device (8) which successively illuminates at least one active transistor region in the IC (1) with a light beam (7) so as to detect the electrical current induced by the beam. A test device (5) passes a test signal to the IC...

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Bibliographic Details
Main Authors YOSHIMOTO, MASAHIKO, ITAMI, HYOGO, JP, KAWAMOTO, KIYOFUMI, TAKARAZUKA, HYOGO, JP
Format Patent
LanguageEnglish
German
Published 27.01.1994
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:A test system contains an Optical Beam Induced Current or OBIC measurement device (8) which successively illuminates at least one active transistor region in the IC (1) with a light beam (7) so as to detect the electrical current induced by the beam. A test device (5) passes a test signal to the IC and simultaneously receives an output signal from its external connections (2a-2c) and an output signal from the OBIC device. Both signals are compared with anticipated values. A synchronisation device synchronises the test and OBIC devices. ADVANTAGE - Allows testing of very large area and highly integrated circuits.
Bibliography:Application Number: DE19934324207