Einrichtung zum Handeln von scheibenförmigen Objekten in einer Handlingebene eines lokalen Reinraumes

• Main Authors: SCHULTZ, KLAUS, O-6908 JENA, DE, GAGLIN, AXEL, O-6902 JENA, DE, HEITMANN, MICHAEL, O-6902 JENA, DE, SCHELER, WERNER, O-6900 JENA, DE, LAHNE, BERNDT, O-6902 JENA, DE
• Format: Patent
• Language: German
• Published: 06.10.1994
• Edition: 5
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

In a device for handling wafer-shaped objects in a handling plane of a local clean room, the aim is to ensure the process stages preceding and succeeding the processing and inspection of the wafer-shaped objects in the conditions of a local clean room using SMIF boxes. According to the invention, the structure of the handling plane (H-H) is in a fixed relationship to a reference plane (E-E) of at least one magazine-indexing device (42) comprising the magazine feed (33) according to their magazine compartments (43) and the wafer-shaped objects therein and is arranged above an intermediate floor (9) which divides the clean room into two superimposed parts (10, 11) in which one component of an airstream from the part (10) above the intermediate floor (9) is directed into the part (11) beneath the intermediate floor (9). The invention is applicable in the manufacture of integrated circuits, especially for handling purposes.