SEKUNDAERELEKTRONEN-DETEKTOR ZUR ANWENDUNG IN EINER GASUMGEBUNG

The invention provides for a device and method for generating, amplifying, and detecting secondary electrons from a surface of a sample. The device contains a vacuum envelope (1) having a pressure limiting aperture (2), a charged particle beam source (3), means (4, 5) for focusing and directing the...

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Main Authors DANILATOS, D., GERASIMOS, NORTH BONDI, NSW 2026, US, MANCUSO, F., JAMES, ROWLEY, MA 01969, US, MAXWELL, B., WILLIAMACUT, MA 01826, US
Format Patent
LanguageGerman
Published 09.06.1993
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:The invention provides for a device and method for generating, amplifying, and detecting secondary electrons from a surface of a sample. The device contains a vacuum envelope (1) having a pressure limiting aperture (2), a charged particle beam source (3), means (4, 5) for focusing and directing the charged particle beam through the aperture (2) to a sample mounted on a sample platform (6) located in a gaseous environment outside of the vacuum envelope (1), an electrode (7) located outside of the vacuum envelope (1) and close to the sample platform (6). In operation, the electrode is biased by a voltage source (8) to accelerate secondary electrons emitted by the sample so that they collide with gas molecules to produce negative charge carriers which multiply by further collisions. The negative charge carriers are collected by the electrode (7) to produce a current which is amplified by a current amplifier (4) and output to a detector (10).
Bibliography:Application Number: DE19883878828T