VERFAHREN ZUR HERSTELLUNG VON MIKROHOHLRAEUMEN UND ANWENDUNG FUER EINEN ELEKTROCHEMISCHEN SENSOR UND FUER EINEN GASCHROMATOGRAFEN

The method produces a microcavity under a layer of enamel. It involves the use of a layer (Ca) of carbon-based material having the dimensions of the microcavity to be obtained. The layer (Ca) is covered with an enamel (SI) except for a small region (G). The system is raised to a high temperature so...

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Bibliographic Details
Main Authors ROUFFY, JEAN-CLAUDE, VELASCO, GONZALO, F-75008 PARIS, FR, PERRET, JOEL, PRIBAT, DIDIER
Format Patent
LanguageGerman
Published 27.05.1993
Edition5
Subjects
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The method produces a microcavity under a layer of enamel. It involves the use of a layer (Ca) of carbon-based material having the dimensions of the microcavity to be obtained. The layer (Ca) is covered with an enamel (SI) except for a small region (G). The system is raised to a high temperature so that the carbon-based material burns. The combustion gases escape through the small region (G). Application to the production of oxygen sensors and microchromatographs.
Bibliography:Application Number: DE19883876056T