HERSTELLUNGSVERFAHREN FUER ABSOLUTDRUCKWANDLEREINHEITEN MIT HALBLEITERN

• Main Authors: KOBAYASHI, RYOICHI, TOUKAI-MURA NAKA-GUN IBARAKI 319-11, JP, MIYAZAKI, ATSUSHI, TAKABA KATSUTA-SHI IBARAKI 312, JP, KOBORI, SHIGEYUKI, HITACHI-SHI IBARAKI 319-12, JP, YAMADA, KAZUJI, HITACHI-SHI IBARAKI 316, JP, SUZUKI, SEIKOU, HITACHIOOTA-SHI IBARAKI 313, JP
• Format: Patent
• Language: German
• Published: 03.12.1992
• Edition: 5
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

A method for manufacturing semiconductor absolute pressure sensor units includes anodically bonding a silicon sensor wafer (10) and a silicon cap wafer (12) with a borosilicate glass layer (32) disposed threbetween so as to surround respective sensor chips on the silicon sensor wafer (10) by introdu...