DE3035933

A pyroelectric detector comprises a body of pyroelectric material (11), an electrode (12) for receiving infrared rays on one face of the pyroelectric material, a shield electrode (13) at the other face of the pyroelectric material, a substrate (15) made of a semiconductor or conductive material whic...

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Main Authors MATSUMURA, SADAO, INAGI, TOKIO/TOKYO, JP, FUKUDA, KATSUYOSHI, KAWASAKI, JP, HIRANO, HITOSHI, KANAGAWA, JP
Format Patent
LanguageEnglish
Published 03.04.1986
Edition4
Subjects
COLORIMETRY
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:A pyroelectric detector comprises a body of pyroelectric material (11), an electrode (12) for receiving infrared rays on one face of the pyroelectric material, a shield electrode (13) at the other face of the pyroelectric material, a substrate (15) made of a semiconductor or conductive material which is fastened to the shield electrode (13), the substrate having a hole (16) corresponding in position to the position of the infrared receiving electrode, and a support (18) to which the substrate is fastened. The method of manufacturing the pyroelectric detector comprises the steps of forming a shield electrode (13) at one face of a pyroelectric wafer (31), making holes (16) in a substrate (15), fastening the substrate to the shield electrode, grinding the other face of the wafer, forming electrodes (12) on the other face of the wafer for receiving infrared rays, the position of the electrodes corresponding to the position of the holes, and dicing the pyroelectric material between the holes to form a single pyroelectric detector.
Bibliography:Application Number: DE19803035933