Pressure measuring device with temp. compensation - has inner chamber separated from measuring and reference chambers by membranes, one forming variable capacitor

The pressure measurement device has an inner chamber filled with insulating fluid and separated from a chamber contg. the pressure being measured and from a reference pressure chamber by two membranes. The second membrane forms a variable capacitor with a fixed flat electrode in the inner chamber. T...

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Bibliographic Details
Main Authors TAMAI,MITSURU, YASUHARA,TAKESHI
Format Patent
LanguageEnglish
German
Published 18.12.1980
Edition3
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:The pressure measurement device has an inner chamber filled with insulating fluid and separated from a chamber contg. the pressure being measured and from a reference pressure chamber by two membranes. The second membrane forms a variable capacitor with a fixed flat electrode in the inner chamber. The device is free of errors caused by variations in temp. The ratio of the change in membrane pressure and vol. is dependent on the reference pressure and inversely on the insulating fluid vol. and temp. expansion coefficient and a reference temp. The further inner chamber is filled with Helium or carbon dioxide.
Bibliography:Application Number: DE19803021476