ANORDNUNG ZUM STEUERN EINES STRAHLDURCHMESSERS

1519726 Electric discharge apparatus INTERNATIONAL BUSINESS MACHINES CORP 26 Oct 1976 [15 Dec 1975] 44526/76 Heading H1D The beam diameter of an electron or ion beam used to bombard a target 29 is varied by first forming the beam and then passing it through a conductive envelope 30 surrounding the b...

Full description

Saved in:
Bibliographic Details
Main Authors KO,WENUANG, SAWATZKY,ERICH
Format Patent
LanguageGerman
Published 16.06.1977
Edition2
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:1519726 Electric discharge apparatus INTERNATIONAL BUSINESS MACHINES CORP 26 Oct 1976 [15 Dec 1975] 44526/76 Heading H1D The beam diameter of an electron or ion beam used to bombard a target 29 is varied by first forming the beam and then passing it through a conductive envelope 30 surrounding the beam and to which a variable potential Ve can be applied, variation of the potential away from ground potential in either direction causing an increase in beam diameter and vice versa. Further variation of the diameter can be effected in some cases by varying the potential of the target. The apparatus can be used in semiconductor manufacture and the beam can be scanned to provide a desired pattern.
Bibliography:Application Number: DE19762647254