DE2148132
An improved method of making piezoelectric thin films comprising zinc oxide having a hexagonal crystalline form by using a cathodic sputtering step capable of controlling the direction of crystallographic orientation in said piezoelectric thin films, characterized in that said cathodic sputtering st...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
10.05.1979
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| Edition | 2 |
| Subjects | |
| Online Access | Get full text |
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| Abstract | An improved method of making piezoelectric thin films comprising zinc oxide having a hexagonal crystalline form by using a cathodic sputtering step capable of controlling the direction of crystallographic orientation in said piezoelectric thin films, characterized in that said cathodic sputtering step comprises co-sputtering of copper or aluminum with zinc in an oxidizing atmosphere. |
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| AbstractList | An improved method of making piezoelectric thin films comprising zinc oxide having a hexagonal crystalline form by using a cathodic sputtering step capable of controlling the direction of crystallographic orientation in said piezoelectric thin films, characterized in that said cathodic sputtering step comprises co-sputtering of copper or aluminum with zinc in an oxidizing atmosphere. |
| Author | WASA, KIYOTAKA, NARA HAYAKAWA, SHIGERU, HIRAKATA, OSAKA |
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| Edition | 2 |
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| Notes | Application Number: DE19712148132 |
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| PublicationDate | 19790510 |
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| PublicationDate_xml | – month: 05 year: 1979 text: 19790510 day: 10 |
| PublicationDecade | 1970 |
| PublicationYear | 1979 |
| RelatedCompanies | MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA, OSAKA (JAPAN) |
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| Snippet | An improved method of making piezoelectric thin films comprising zinc oxide having a hexagonal crystalline form by using a cathodic sputtering step capable of... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| Title | DE2148132 |
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