Test system for examining smooth surface of sample using laser beam

The test system includes a stray light device (1) for scanning the surface of a sample with a focused laser beam (4) and for detecting scattered light, which is reflected from the surface as the surface is scanned. the system also has a device to microscopically examine the markedly light scattering...

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Main Authors HENZLER, MARTIN, DR., 30826 GARBSEN, DE, KUMPE, RALF., 30900 WEDEMARK, DE, FRISCHAT, HANNES., 30175 HANNOVER, DE, KOPP, FRANZ-OTTO.., 30171 HANNOVER, DE
Format Patent
LanguageEnglish
German
Published 27.08.1998
Edition6
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:The test system includes a stray light device (1) for scanning the surface of a sample with a focused laser beam (4) and for detecting scattered light, which is reflected from the surface as the surface is scanned. the system also has a device to microscopically examine the markedly light scattering section of the surface, after its identification using the stray light device. An evacuatable sample chamber (2) is provided, in which the sample can be placed on a sample holder (16), and which has a transparent window (10), through which the laser beam passes, before it impinges on the surface of the sample. A deflection mirror (7) is cardan-mounted in the light path of the laser beam and is used to scan the surface of the sample.
Bibliography:Application Number: DE1997106973