Druck- oder Differenzdrucksensor

(Differential) pressure sensor comprises a membrane (1) having a measuring element (4), and a holder (10). The novelty is that a protective device is formed by an electrically insulating layer (7) applied on the membrane (2), this layer being covered by a liquid-tight amorphous metal layer (8). Prod...

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Bibliographic Details
Main Authors DYRBYE, KARSTEN, BJERRINGBRO, DK, BROWN, TINA ROMEDAHL, BJERRINGBRO, DK, ANDERSEN, PER ELLEMOSE, BJERRINGBRO, DK, JENSEN, NIELS DUE, BJERRINGBRO, DK
Format Patent
LanguageGerman
Published 16.10.1997
Edition6
Subjects
ALLOYS
CHEMISTRY
FERROUS OR NON-FERROUS ALLOYS
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
METALLURGY
PHYSICS
TESTING
TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Summary:(Differential) pressure sensor comprises a membrane (1) having a measuring element (4), and a holder (10). The novelty is that a protective device is formed by an electrically insulating layer (7) applied on the membrane (2), this layer being covered by a liquid-tight amorphous metal layer (8). Production of the sensor is also claimed by coating the membrane with the electrically insulating layer and subsequently applying the amorphous metal layer by vaporising.
Bibliography:Application Number: DE19961014458