Vorrichtung zum Trocknen von Halbleiterkristallscheiben durch Einwirkung einer Zentrifugalkraft

Saved in:
Bibliographic Details
Main Author YUEKSEL YUECELEN,.DR
Format Patent
LanguageGerman
Published 26.02.1970
Subjects
CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL ORCHEMICAL PROCESSES
CENTRIFUGES
PERFORMING OPERATIONS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Bibliography:Application Number: DE19671532748