MEMS zum Kontrollieren eines Fluidstroms

An MMS has a first layer which has a first opening for letting pass a fluid. Additionally, a second layer which is arranged opposite the first layer is provided, and having a second layer for letting pass the fluid. Together with the first layer, it forms at least part of a layer stack with layers s...

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Bibliographic Details
Main Authors Melnikov, Anton, Kaiser, Bert
Format Patent
LanguageGerman
Published 28.03.2024
Subjects
ACTUATING-FLOATS
BLASTING
COCKS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DEVICES FOR VENTING OR AERATING
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
GENERATION
HEATING
LIGHTING
MECHANICAL ENGINEERING
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TAPS
THERMAL INSULATION IN GENERAL
TRANSPORTING
VALVES
WEAPONS
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Summary:An MMS has a first layer which has a first opening for letting pass a fluid. Additionally, a second layer which is arranged opposite the first layer is provided, and having a second layer for letting pass the fluid. Together with the first layer, it forms at least part of a layer stack with layers stacked in a stacking direction perpendicular to a substrate plane of the MEMS. A cavity arranged between the first layer and the second layer is arranged and has an element which is moveable along a direction in parallel to the substrate plane, which has at least a first and a second positioning, wherein, in the first positioning, flow-through of the fluid is inhibited and, in the second positioning, flow-through of the fluid through the cavity along the stacking direction is possible.
Bibliography:Application Number: DE20211107773T