Hartmaske mit hoher Selektivität für IR-Sperrschichten zur Herstellung eines ferroelektrischen Kondensators

• Main Authors: KUMURA, YOSHINORI, TOMIOKA, KAZUHIRO, EGGER, ULRICH, KANAYA, HIROYUKI, ZHUANG, HAOREN
• Format: Patent
• Language: German
• Published: 29.12.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS; GENERATION; SEMICONDUCTOR DEVICES

The present invention provides a ferroelectric device relatively free of fences by using a hardmask having high etching selectivity relative to an underlying barrier layer. The present invention also includes a method for suppressing the fences clinging to the sidewalls of ferroelectric devices. Add...