Verfahren zur Herstellung einer (RO)(R'O)(R''O)M=O-Verbindung, dünnschichtbildendes Material, Dünnschicht und Halbleiterelement
A technique for mass-producing (RO)3M=O of high purity at low cost is provided. (RO)(R'O)(R"O)M is reacted with ozone. M is As or P. R, R' and R" are alkyl groups, each which has the same type or a different type.
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Main Authors | , , |
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Format | Patent |
Language | German |
Published |
17.03.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A technique for mass-producing (RO)3M=O of high purity at low cost is provided. (RO)(R'O)(R"O)M is reacted with ozone. M is As or P. R, R' and R" are alkyl groups, each which has the same type or a different type. |
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Bibliography: | Application Number: DE2003138731 |