System to hold a group of lenses, in a katadioptric lens at a light projector for microlithography, has structured uncoupling units for suspension in the carrier with the required stiffness

The system to hold a group of lenses (12) within a lens assembly has at least one uncoupling unit (14',16) to suspend the lens group in a carrier structure (13), with stiffness on a line parallel to the force of gravity. The unit is structured so that, in at least one working range, a rotary or...

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Bibliographic Details
Main Authors SCHOEPPACH, ARMIN, RAU, JOHANNES, GEUPPERT, BERNHARD
Format Patent
LanguageEnglish
German
Published 26.02.2004
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:The system to hold a group of lenses (12) within a lens assembly has at least one uncoupling unit (14',16) to suspend the lens group in a carrier structure (13), with stiffness on a line parallel to the force of gravity. The unit is structured so that, in at least one working range, a rotary or translatory movement is blocked in at least one spatial direction to give a set static mounting. Suspension at the carrier in another direction is by a combination of uncoupling units (19) with a tangential stiffness, and a membrane (17). Eine Vorrichtung dient zur Aufnahme einer optischen Baugruppe (12) in einer mehrere optische Baugruppen umfassenden Abbildungseinrichtung (7, 7'). Insbesondere dient die Vorrichtung zur Aufnahme einer Linsengruppe in einem Objektiv. Die optische Baugruppe (12) ist über wenigstens ein Entkoppelungselement (14, 14', 16) in wenigstens einem Bereich in einer Tragstruktur (13) aufgehängt. Das wenigstens eine Entkopplungselement (14, 14', 16) ist in dem wenigstens einen Bereich in seiner resultierenden Wirkung eine mögliche Bewegung in wenigstens einer geeigneten von drei orthogonalen Raumrichtungen hinsichtlich Rotation oder Translation behindert, sodass zumindest eine statisch bestimmte Lagerung entsteht.
Bibliography:Application Number: DE2003116589