Isolatorstruktur und Verfahren zur Erzeugung von Isolatorstrukturen in einem Halbleitersubstrat

Production of insulator structures in a semiconductor substrate (1) comprises forming a barrier layer (32) blocking an exchange of the additive with the substrate before a main layer (33) is deposited. An independent claim is also included for an insulator structure produced by the above process.

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Bibliographic Details
Main Author RADECKER, JOERG
Format Patent
LanguageGerman
Published 16.08.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Production of insulator structures in a semiconductor substrate (1) comprises forming a barrier layer (32) blocking an exchange of the additive with the substrate before a main layer (33) is deposited. An independent claim is also included for an insulator structure produced by the above process.
Bibliography:Application Number: DE20031011312