Turbo molecular pump has stator discs spaced out by oversized distance rings separated at a point with separating line at inclined angle to press rings against inside wall of housing during assembly
The pump has rotor and stator discs arranged alternately in succession in a cylindrical housing (1). The stator discs are spaced out by distance rings (14) which are oversized and separated at a point (16) with the separating line running at an angle inclined to the axial direction so that during as...
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Main Authors | , |
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Format | Patent |
Language | English German |
Published |
19.08.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | The pump has rotor and stator discs arranged alternately in succession in a cylindrical housing (1). The stator discs are spaced out by distance rings (14) which are oversized and separated at a point (16) with the separating line running at an angle inclined to the axial direction so that during assembly the rings are spread out through axial pressure to press against the inside wall (15) of the housing.
Die Erfindung betrifft eine Turbomolekularpumpe, bei der Rotor- (10) und Statorscheiben (12) in einem zylindrischen Gehäuse (1) abwechselnd hintereinander angeordnet sind. Die Statorscheiben (12) werden durch Distanzringe (14) auf Abstand gehalten. Diese Distanzringe sind im Übermaß gefertigt und an einer Stelle (16) getrennt. Die Trennungslinie verläuft in einem Winkel schräg zur axialen Richtung. Bei der Montage werden die Distanzringe gespreizt und so an die innere Gehäusewand gedrückt. Dadurch wird die Wärmeableitung aus der Pumpe deutlich verbessert. |
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Bibliography: | Application Number: DE2003104990 |