BAW-Resonator mit akustischem Reflektor und Filterschaltung

The multilayer acoustic reflector (110) for the BAW (Bulk Acoustic Wave) resonator has multiple layers (112-120) of alternate high acoustic impedance and low acoustic impedance material. It is mounted under a piezoelectric layer (102) with electrodes on top (104) and bottom (106) surfaces. The refle...

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Bibliographic Details
Main Authors MARKSTEINER, STEPHAN, FATTINGER, GERNOT, AIGNER, ROBERT, KAITILA, JYRKI
Format Patent
LanguageGerman
Published 28.08.2008
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Summary:The multilayer acoustic reflector (110) for the BAW (Bulk Acoustic Wave) resonator has multiple layers (112-120) of alternate high acoustic impedance and low acoustic impedance material. It is mounted under a piezoelectric layer (102) with electrodes on top (104) and bottom (106) surfaces. The reflector is formed on top of a substrate layer (108). The configuration of the reflector layers is chosen so that the transmissivity for longitudinal and shear waves less than -10 dB in the region of the resonance frequency.
Bibliography:Application Number: DE20021062056